Oxford Plasmalab 100 ICP RIE Sold
Asset # :
45031
Equipment Make:
Oxford
Equipment Model:
Plasmalab 100
Type:
ICP-RIE
Wafer Size:
Equipment Configuration:
Optional Accessories:
– Edwards iGX100N Pump
– Alcatel ATH 1600M Pump
Known Problems:
– The roughing valve for the main chamber is leaking. This is a recent issue
and it has not been addressed yet as the chamber vacuum is still reasonable
for etch process
Equipment Pictures:
Equipment Video:
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Added: October 9, 2020
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Views: 653