Nikon NSR S 203 B Lithography Stepper
Asset # :
77809
Equipment Make:
Nikon
Equipment Model:
NSR S 203 B
Type:
Lithography Stepper
Wafer Size:
Equipment Configuration:
- DUV Scanner: 8"
- Reticle size: 6"
- NA: 0.68
- Light Source: KRF Excimer Laser CYMER ELS5400
- Reduction Ratio: 1:4
- Field: 22 mm X 33 mm
- Wafer Loader Type 3
- Resolution: 180 nm
- Temperature controller
- Loader controller (WL/RL)
- PCB Controller rack
- Isolation transformer
- Standard BMU
PPD
- Bar code reader
- Reticle size: 6"
- NA: 0.68
- Light Source: KRF Excimer Laser CYMER ELS5400
- Reduction Ratio: 1:4
- Field: 22 mm X 33 mm
- Wafer Loader Type 3
- Resolution: 180 nm
- Temperature controller
- Loader controller (WL/RL)
- PCB Controller rack
- Isolation transformer
- Standard BMU
PPD
- Bar code reader
Equipment Pictures:
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Added: April 17, 2024
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Views: 37