KLA Tencor Surfscan 6200 Particle Counter
Asset # :
77787
Equipment Make:
KLA-Tencor
Equipment Model:
Surfscan 6200
Type:
Particle Counter
Wafer Size:
8"
Equipment Configuration:
- 0.1 micron Defect Sensitivity (PSL STD)
- 0.02 ppm Haze Sensitivity
- 0.002 ppm Haze Resolution
- Accuracy within 1%
- XY coordinates
- Lock Down accessories
- Tencor approved blower assembly
- 30mW New Ar-Laser
- 208V/60HZ, 17A
- MS-DOS 6.22 ,Windows 3.1
- Software version: 2.1
1994 Vintage
- 0.02 ppm Haze Sensitivity
- 0.002 ppm Haze Resolution
- Accuracy within 1%
- XY coordinates
- Lock Down accessories
- Tencor approved blower assembly
- 30mW New Ar-Laser
- 208V/60HZ, 17A
- MS-DOS 6.22 ,Windows 3.1
- Software version: 2.1
1994 Vintage
Equipment Pictures:
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Added: April 23, 2024
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Views: 114