Dainippon (DNS) SK 80 BW AVPE Coater / Developer
Asset # :
77775
Equipment Make:
Dainippon (DNS)
Equipment Model:
SK 80 BW-AVPE
Type:
Coater / Developer
Wafer Size:
8"
Equipment Configuration:
- Process: Photo
- 4 Cassette Loading Port
- Cassette Index Station: 4 Side Loading
- 2 Coater & 2 Developer Layout
- Wafer Transfer Robot x 1 (1 Block System)
- Main Body, CCD, ETU, TCU, Power (USA)
- PR Resist Pump: Iwaki Bellows Pump 4 Set Per 1 Spin Unit
- Wafer Flow Direction: Right to Left
1995 Vintage
- 4 Cassette Loading Port
- Cassette Index Station: 4 Side Loading
- 2 Coater & 2 Developer Layout
- Wafer Transfer Robot x 1 (1 Block System)
- Main Body, CCD, ETU, TCU, Power (USA)
- PR Resist Pump: Iwaki Bellows Pump 4 Set Per 1 Spin Unit
- Wafer Flow Direction: Right to Left
1995 Vintage
Equipment Pictures:
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Added: April 24, 2024
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Views: 72