Lam 2300 Exelan Flex 45 ICP Etcher
Asset # :
77603
Equipment Make:
Lam
Equipment Model:
2300 Exelan Flex 45
Type:
ICP Etcher
Wafer Size:
12"
Equipment Configuration:
- With 12 gas lines
- Sustains the activities on nano-patterning transfer capability and specially block co-polymers, graphene, and shaped nanostructures etching
- C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2
- Single chamber with homemade manual load lock
- 27MHz RF generator not working
- Can etch with other 2 RF generators, but get water flow error
- Sustains the activities on nano-patterning transfer capability and specially block co-polymers, graphene, and shaped nanostructures etching
- C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2
- Single chamber with homemade manual load lock
- 27MHz RF generator not working
- Can etch with other 2 RF generators, but get water flow error
Equipment Pictures:
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Added: April 9, 2024
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Views: 105