Novellus / Lam Vector CVD

Asset # : 77525

Equipment Make: Novellus / Lam

Equipment Model: Vector

Type: CVD

Wafer Size: 12"

Equipment Configuration: - 2x FOUP Loadports
- Mini-Environment (Front End)
- Atmospheric Robot
- User Interface: screen & computer
- Light Tower
- 2x Loadlocks
- 2x Loadlock Cooling Pedestals
- 2x Linear Transfer Modules
- 4x Showerheads (subject to availability)
- Al Heater Ped

Equipment Pictures: