KLA Tencor UV 1280 SE Film Thickness Measurement Tool
Asset # :
77281
Equipment Make:
KLA-Tencor
Equipment Model:
UV 1280 SE
Type:
Film Thickness Measurement Tool
Wafer Size:
8"
Equipment Configuration:
- Parts Tool
- Handler: H3-NR Wafer Handler, SMIF
- Cassette Handling: SMIF
- Robot: H3 PRI Wafer handler, Dual End-Effector
- Chuck Type: 100/150/200mm
- Operator Interface: Trackball and keyboard standard
- PC configurations:
- CPU: Pentium III
- Handler: H3-NR Wafer Handler, SMIF
- Cassette Handling: SMIF
- Robot: H3 PRI Wafer handler, Dual End-Effector
- Chuck Type: 100/150/200mm
- Operator Interface: Trackball and keyboard standard
- PC configurations:
- CPU: Pentium III
Equipment Pictures:
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Added: March 26, 2024
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Views: 26