KLA Tencor / Vistec / Leica INS 3000 Defect Inspection System –
Asset # :
77167
Equipment Make:
KLA-Tencor / Vistec / Leica
Equipment Model:
INS 3000
Type:
Defect Inspection System
Wafer Size:
6"
Equipment Configuration:
- Fully automatic integrated microscope including UV and Confocal
- Universal wafer handler
- 1 to 3 cassette front loading, including SMIF
- Windows NT based graphical user interface
1999 Vintage
- Universal wafer handler
- 1 to 3 cassette front loading, including SMIF
- Windows NT based graphical user interface
1999 Vintage
Equipment Pictures:
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Added: March 15, 2024
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Views: 83