Gasonics L 3510 Asher
Asset # :
77087
Equipment Make:
Gasonics
Equipment Model:
L 3510
Type:
Asher
Wafer Size:
Equipment Configuration:
- HAtm 5.0 Robot
- Software Version: Win XP & IDX (PC type)
- MW Power: 1.25kw model C12935
- Gas: 2 Gas O2. & N2
- Software Version: Win XP & IDX (PC type)
- MW Power: 1.25kw model C12935
- Gas: 2 Gas O2. & N2
Equipment Pictures:
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Added: March 11, 2024
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Views: 131