Gasonics L 3510 Asher
Asset # :
77086
Equipment Make:
Gasonics
Equipment Model:
L 3510
Type:
Asher
Wafer Size:
Equipment Configuration:
- Software version: 7.5 gem
- MW Power: 1.25kw / Model C12935
- Gas: 2 gas O2 & N2
- Brooks Zbot Robot
- MW Power: 1.25kw / Model C12935
- Gas: 2 gas O2 & N2
- Brooks Zbot Robot
Equipment Pictures:
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Added: March 11, 2024
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Views: 90