Nikon VMZ R 3020 CNC Video Measuring System
Asset # :
76785
Equipment Make:
Nikon
Equipment Model:
VMZ R 3020
Type:
CNC Video Measuring System
Wafer Size:
Equipment Configuration:
- Stroke (X x Y x Z): 300 x 200 x 200 mm
- Measurement Accuracy:
- (XY 1 axis) 1.2 + 4L / 1000μm
- (XY 2 axis) 2.0 + 4L / 1000μm
- (Z axis) 1.2 + 5L / 1000μm
- Auto Focus: Laser AF, Image AF (* If Type A selected, Laser AF is optional)
- Illum
- Measurement Accuracy:
- (XY 1 axis) 1.2 + 4L / 1000μm
- (XY 2 axis) 2.0 + 4L / 1000μm
- (Z axis) 1.2 + 5L / 1000μm
- Auto Focus: Laser AF, Image AF (* If Type A selected, Laser AF is optional)
- Illum
Equipment Pictures:
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Added: February 22, 2024
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Views: 156