Tel Clean Track Lithius i+ Coater / Developer
Asset # :
76726
Equipment Make:
Tel
Equipment Model:
Clean Track Lithius i+
Type:
Coater / Developer
Wafer Size:
12 inch
Equipment Configuration:
- Chemicals & gasses introduced: Resins, HMDS, EC-Solvent, TMA238, nitrogen
- Non-functional module: IRAI 5-0 (driver out of order)
- Never been used module: ITC 3-3
- Scanner: ASML 193i
Spares Available:
- Pcs 2 Flowliter Ultrasonic Valve
- Filter
- Pres
- Non-functional module: IRAI 5-0 (driver out of order)
- Never been used module: ITC 3-3
- Scanner: ASML 193i
Spares Available:
- Pcs 2 Flowliter Ultrasonic Valve
- Filter
- Pres
Equipment Pictures:
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Added: February 20, 2024
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Views: 303