Canon FPA 3000 i 5 i Line Stepper
Asset # :
76695
Equipment Make:
Canon
Equipment Model:
FPA 3000 i 5
Type:
i-Line Stepper
Wafer Size:
8"
Equipment Configuration:
- Wafer type: OF
- Reticle Size: 6"
- Lens: UL32
- 208V
- SMIF/FOUP: no/no
- Reticle Size: 6"
- Lens: UL32
- 208V
- SMIF/FOUP: no/no
Equipment Pictures:
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Added: February 16, 2024
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Views: 53