Tel ACT 12 DUV Photoresist Coater and Developer Track
Asset # :
76633
Equipment Make:
Tel
Equipment Model:
ACT 12
Type:
DUV Photoresist Coater and Developer Track
Wafer Size:
12"
Equipment Configuration:
- The direction of wafer flow is right to left
- 300mm – 12inch wafer setup
- Type 4 Main controller
- Dual Block
- Dispense Monitoring system on all 24 resist lines
- Aut- air vent function on all resist LE tanks
- 4 FOUP load ports for 12” wafers
- 2 CO
- 300mm – 12inch wafer setup
- Type 4 Main controller
- Dual Block
- Dispense Monitoring system on all 24 resist lines
- Aut- air vent function on all resist LE tanks
- 4 FOUP load ports for 12” wafers
- 2 CO
Equipment Pictures:
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Added: February 13, 2024
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Views: 53