Lam 9600 Metal Etcher
Asset # :
76615
Equipment Make:
Lam
Equipment Model:
9600
Type:
Metal Etcher
Wafer Size:
Equipment Configuration:
- Etch strip
- Wafer chambers
- Chemistry: BCL3, C2, SF6, HE, AR
- Operating System: Lam Special
- Wafer chambers
- Chemistry: BCL3, C2, SF6, HE, AR
- Operating System: Lam Special
Equipment Pictures:
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Added: February 9, 2024
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Views: 158