Lam Rainbow 4520 Etcher
Asset # :
76457
Equipment Make:
Lam
Equipment Model:
Rainbow 4520
Type:
Etcher
Wafer Size:
Equipment Configuration:
- Hine indexer
- 1 chamber
Automation online component: SECS/GEM
- No fixed gap chamber
- EPD: Verity EP200Mmd (250~730nm)
- Surface finish: 10 RA
- Standalone Gas Box mounting
- Standalone Gas Box Std stacking kit
- Gas lines: 8
- GAS 1:Ar_1000 sccm (UF
- 1 chamber
Automation online component: SECS/GEM
- No fixed gap chamber
- EPD: Verity EP200Mmd (250~730nm)
- Surface finish: 10 RA
- Standalone Gas Box mounting
- Standalone Gas Box Std stacking kit
- Gas lines: 8
- GAS 1:Ar_1000 sccm (UF
Equipment Pictures:
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Added: January 29, 2024
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Views: 157