Tel Clean Track Act 8 Coater / Developer
Asset # :
76084
Equipment Make:
Tel
Equipment Model:
Clean Track Act 8
Type:
Coater / Developer
Wafer Size:
8"
Equipment Configuration:
- Wafer Flow: Left to Right
- Main Controller: #3
- Coater Unit
- 2-1, 2-2: 8 dispense nozzle for each unit
- 2-3, 2-4: 4 dispense nozzle for each unit
- RRC Pump
- Developer Unit
- NLD nozzle
- TCU: 1 Set
- THC: 1 Set (ESA-4-D-04)
- Chemical Bo
- Main Controller: #3
- Coater Unit
- 2-1, 2-2: 8 dispense nozzle for each unit
- 2-3, 2-4: 4 dispense nozzle for each unit
- RRC Pump
- Developer Unit
- NLD nozzle
- TCU: 1 Set
- THC: 1 Set (ESA-4-D-04)
- Chemical Bo
Equipment Pictures:
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Added: January 24, 2024
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Views: 75