Hitachi CG 4000 CD SEM

Asset # : 75546

Equipment Make: Hitachi

Equipment Model: CG 4000

Type: CD SEM

Wafer Size: 12"

Equipment Configuration: - Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)
- Resolution: 1.8 nm (Accelerating voltage: 800V)
- Accelerating Voltage: 300 - 1, 600V (10V steps) (200 - 2,000V: Option)
- Repeatability: ±1% or 0.3 nm (3σ) max
- SW Version: 33.1

Equipment Pictures: