ASML PAS 5500/300 C Wafer Stepper

Asset # : 75362
Equipment Make: ASML
Equipment Model: PAS 5500 / 300 C
Type: Wafer Stepper
Wafer Size: 6"
Equipment Configuration: - SW version: 8.9.0.c
- PC (Sun): Netra
- Chuck Type: SiC (LC)
- Light source (Cymer Laser): 5600 KrF
- CLEAR (auto chuck cleaning): N/A
- STARTSMART (overlay improvement): N/A
- DoseMapper (CD improvement): NO
- CPE (Correction per exposure): NO
- Test S
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  • Added: December 4, 2023

  • Views: 34

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