ASML PAS 5500/300 C Wafer Stepper Sold

Asset # : 75362

Equipment Make: ASML

Equipment Model: PAS 5500 / 300 C

Type: Wafer Stepper

Wafer Size: 6"

Equipment Configuration: - SW version: 8.9.0.c
- PC (Sun): Netra
- Chuck Type: SiC (LC)
- Light source (Cymer Laser): 5600 KrF
- CLEAR (auto chuck cleaning): N/A
- STARTSMART (overlay improvement): N/A
- DoseMapper (CD improvement): NO
- CPE (Correction per exposure): NO
- Test S

Equipment Pictures: