Nikon NSR TFHI 14 DL Stepper

Asset # : 75351
Equipment Make: Nikon
Equipment Model: NSR TFH i 14 DL
Type: Stepper
Wafer Size: 8"
Equipment Configuration: - Hard disk: SSD
- MCSV basic: V3.46F
PC:
- OCS option: G3.45Q
- WINXP X64 / VMS7.2.1
- PC type: NEST-A
- Disk drive: SSD
- Illumination: UV- Lamp 5:1 NA 0.3-0.45 Variable, 0.5µm
Other:
- Wafer stage type: Air Bearing
- Field size: 22mm
- Wafer alignment:
Equipment Pictures:

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  • Added: November 30, 2023

  • Views: 71

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