Nikon NSR TFHI 14 DL Stepper
Asset # :
75351
Equipment Make:
Nikon
Equipment Model:
NSR TFH i 14 DL
Type:
Stepper
Wafer Size:
8"
Equipment Configuration:
- Hard disk: SSD
- MCSV basic: V3.46F
PC:
- OCS option: G3.45Q
- WINXP X64 / VMS7.2.1
- PC type: NEST-A
- Disk drive: SSD
- Illumination: UV- Lamp 5:1 NA 0.3-0.45 Variable, 0.5µm
Other:
- Wafer stage type: Air Bearing
- Field size: 22mm
- Wafer alignment:
- MCSV basic: V3.46F
PC:
- OCS option: G3.45Q
- WINXP X64 / VMS7.2.1
- PC type: NEST-A
- Disk drive: SSD
- Illumination: UV- Lamp 5:1 NA 0.3-0.45 Variable, 0.5µm
Other:
- Wafer stage type: Air Bearing
- Field size: 22mm
- Wafer alignment:
Equipment Pictures:
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Added: November 30, 2023
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Views: 63