Nikon NSR TFHi 14 DL Stepper
Asset # :
75310
Equipment Make:
Nikon
Equipment Model:
NSR TFHi 14 DL
Type:
Stepper
Wafer Size:
12"
Equipment Configuration:
- Hard Disk SSD
- MCSV Basic V3.46f
- OCS Option G3.45q
- Main System Winxp X64 / Vms7.2.1
- PC Type Nest-A
- Disk Drive SSD
- Illumination Uv- Lamp
- 5:1 Na 0.3-0.45 Variable, 0.5µm
- Wafer Stage Type Air Bearing
- Field Size
- Wafer Alignment FIA / LSA
- MCSV Basic V3.46f
- OCS Option G3.45q
- Main System Winxp X64 / Vms7.2.1
- PC Type Nest-A
- Disk Drive SSD
- Illumination Uv- Lamp
- 5:1 Na 0.3-0.45 Variable, 0.5µm
- Wafer Stage Type Air Bearing
- Field Size
- Wafer Alignment FIA / LSA
Equipment Pictures:
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Added: November 29, 2023
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Views: 437