Nikon NSR TFHi 14 DL Stepper

Asset # : 75310
Equipment Make: Nikon
Equipment Model: NSR TFHi 14 DL
Type: Stepper
Wafer Size: 12"
Equipment Configuration: - Hard Disk SSD
- MCSV Basic V3.46f
- OCS Option G3.45q
- Main System Winxp X64 / Vms7.2.1
- PC Type Nest-A
- Disk Drive SSD
- Illumination Uv- Lamp
- 5:1 Na 0.3-0.45 Variable, 0.5µm
- Wafer Stage Type Air Bearing
- Field Size
- Wafer Alignment FIA / LSA
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  • Added: November 29, 2023

  • Views: 388

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