Ultratech LSA 100 A Wafer Stepper

Asset # : 75096
Equipment Make: Ultratech
Equipment Model: LSA 100 A
Type: Wafer Stepper
Wafer Size: 12"
Equipment Configuration: - Laser Spike Anneal (LSA)
- Process Chamber
- Cooling Chamber
- Laser
- Heat Exchanger
- AC Rack
- 115 VAC / 1 Phase / 50/60 Hz
- 2 wire + Ground
- 15 Amps FLA / 6 Amps Largest Load
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  • Added: November 13, 2023

  • Views: 48

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