Axcelis / SEN NV GSD HE Implanter

Asset # : 75009
Equipment Make: Axcelis / SEN
Equipment Model: NV-GSD-HE
Type: Implanter
Wafer Size:
Equipment Configuration: - ATM Robot: SEN P/N:11 S 7452-14
- HV Power Supply
- Notch
- Load Lock Type
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  • Added: November 7, 2023

  • Views: 215

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