Varian VIISta HC Ion Implantation System
Asset # :
74589
Equipment Make:
Varian
Equipment Model:
VIISta HC
Type:
Ion Implant System
Wafer Size:
Equipment Configuration:
- 1 channel
- SCCM type
- 6 Gas lines
- SCCM type
- 6 Gas lines
Equipment Pictures:
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Added: October 16, 2023
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Views: 44