Accent / Nanometrics RPM Sigma Photoluminescence

Asset # : 73885
Equipment Make: Accent / Nanometrics
Equipment Model: RPM Sigma
Type: Photoluminescence
Wafer Size:
Equipment Configuration: - 980nm laser
- InGaAs and Ex-InGaAs detectors (up to 2.04um cutoff) installed
- Gratings are 150mm/g and 300mm/g
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  • Added: September 5, 2023

  • Views: 105

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