CHA Mark 40 C Evaporator
Asset # :
73033
Equipment Make:
CHA
Equipment Model:
Mark 40 C
Type:
Evaporator
Wafer Size:
Equipment Configuration:
- Process Chamber Dimensions: 26” x 26”
- CHA SR-10 E-Beam Power Supply (10kW)
- CHA T271-4-1 Electron Beam Source
- Crucible: 4 pockets, 15cc each
- CHA Beam Sweep Controller
- CHA Auto Tech-2 Pump Cycle Controller
- Blade Position Controller
- Fixture C
- CHA SR-10 E-Beam Power Supply (10kW)
- CHA T271-4-1 Electron Beam Source
- Crucible: 4 pockets, 15cc each
- CHA Beam Sweep Controller
- CHA Auto Tech-2 Pump Cycle Controller
- Blade Position Controller
- Fixture C
Equipment Pictures:
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Added: August 16, 2023
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Views: 433