Nikon S 306 C

Asset # : 73000
Equipment Make: Nikon
Equipment Model: S 306 C
Type: Scanner
Wafer Size:
Equipment Configuration: -Resolution ≤ 100 nm -NA 0.78 -Exposure source ArF excimer laser (193 nm wavelength) -Reduction magnification 1:4 -Maximum exposure range 25 × 33 mm -Overlap accuracy (EGA, |M| + 3σ) ≤ 20 nm
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  • Added: November 2, 2023

  • Views: 7

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