Canon – Anelva C 7100

Asset # : 72114
Equipment Make: Canon - Anelva
Equipment Model: C 7100
Type: PVD Cluster Tool
Wafer Size: 8"
Equipment Configuration: - Triple transfer chambers (loadlock/cluster 1, cluster-to-cluster, cluster 2) w/ Brooks Magna-Tran robots - CIS CH-A process module w/ Shimadzu TMP turbo pump - Etch/OXI-EX (CH-B) process module w/ Inficon Transpector XPR3 RGA, Shimadzu TMP-3203LM-N1 tur
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  • Added: November 2, 2023

  • Views: 10

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