KLA Tencor Surfscan 6220 Automatic Surface Inspection System
Asset # :
71285
Equipment Make:
KLA-Tencor
Equipment Model:
Surfscan 6220
Type:
Automatic Surface Inspection System
Wafer Size:
6" & 8"
Equipment Configuration:
- Bare Wafer Surface Defect Inspection System
- Thickness: SEMI Standard Wafer Thickness
- Throughput: 100 wph (200 mm) at 0.12 mm
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Thickness: SEMI Standard Wafer Thickness
- Throughput: 100 wph (200 mm) at 0.12 mm
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
Equipment Pictures:
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Added: May 10, 2023
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Views: 193