Applied Materials EMAX CT+ Dielectric Etch Chamber
Asset # :
70884
Equipment Make:
Applied Materials
Equipment Model:
eMax CT Plus
Type:
Dielectric Etch Chamber
Wafer Size:
Equipment Configuration:
- Alcatel ATH 1600 M Turbo Pump
- RF Match Box:
- Bias: 13.5 MHz (Bias) & 2 MHz (LF Bias)
- LF Bias: Daihen RMN-50N1
- Source: Daihen AMN-30 H 60 MHz
- Gate Valve: Nor-Cal / NC-95-PP
- RF Generator
- FIB: eFib, wFib
- Chamber Equip Cart
- RF Match Box:
- Bias: 13.5 MHz (Bias) & 2 MHz (LF Bias)
- LF Bias: Daihen RMN-50N1
- Source: Daihen AMN-30 H 60 MHz
- Gate Valve: Nor-Cal / NC-95-PP
- RF Generator
- FIB: eFib, wFib
- Chamber Equip Cart
Equipment Pictures:
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Added: April 26, 2023
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Views: 110