KLA Tencor SP 1 TBI Inspection System Sold
Asset # :
70009
Equipment Make:
KLA-Tencor
Equipment Model:
SP 1 TBI
Type:
Inspection System
Wafer Size:
Equipment Configuration:
- Windows NT, RAM 523700 KB
- SP1 SW version 3.50.2304
- Oblique Option, XY Enhancement
- 488 nm 30mW Argon – Ion Laser wavelength
- Optics configuration: DWO,DNO,DWN,DNN
- Note： DWO: Dark field Wide channel Oblique path, DNO: Dark field Narrow channel Ob
- SP1 SW version 3.50.2304
- Oblique Option, XY Enhancement
- 488 nm 30mW Argon – Ion Laser wavelength
- Optics configuration: DWO,DNO,DWN,DNN
- Note： DWO: Dark field Wide channel Oblique path, DNO: Dark field Narrow channel Ob
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Added: March 13, 2023
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Views: 622