Tel Unity 2 e 855 PP Etching System
Asset # :
69329
Equipment Make:
Tel
Equipment Model:
Unity 2 E 855 PP
Type:
Etcher
Wafer Size:
Equipment Configuration:
- 2 Chamber system
- Gas: CHF3/CF4/O2
- SiO2/SiN
With Ebara pumps:
- 1 Load Lock
- 2 Process Chambers
- 1 Platform
- Gas: CHF3/CF4/O2
- SiO2/SiN
With Ebara pumps:
- 1 Load Lock
- 2 Process Chambers
- 1 Platform
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Added: February 1, 2023
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Views: 114