Applied Materials DPSTM Centura 11 Dry Etcher
Asset # :
67809
Equipment Make:
Applied Materials
Equipment Model:
DPSTM Centura 11
Type:
Dry Etcher
Wafer Size:
Equipment Configuration:
- 2 Chambers (the other chamber EMPTY)
- Gas: Cl2, HBr, O2, N2, SF6, CF4, Ar
- Power Supply
- Chiller (x2)
- Pump (x2)
- Gas: Cl2, HBr, O2, N2, SF6, CF4, Ar
- Power Supply
- Chiller (x2)
- Pump (x2)
Equipment Pictures:
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Added: October 31, 2022
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Views: 52