FirstNano Easytube 3000 CVD
Asset # :
67477
Equipment Make:
FirstNano
Equipment Model:
EasyTube 3000
Type:
CVD
Wafer Size:
3"
Equipment Configuration:
- Built-in interlock and transfer arm
- It was used to grow carbon on Silicon wafers, such as CNT and graphene, no metal ever used in the chamber
- 208V, 3 phase system
- It was used to grow carbon on Silicon wafers, such as CNT and graphene, no metal ever used in the chamber
- 208V, 3 phase system
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Added: October 4, 2022
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Views: 160