Applied Materials Centura AP Etcher
Asset # :
66905
Equipment Make:
Applied Materials
Equipment Model:
Centura AP
Type:
Etcher
Wafer Size:
12"
Equipment Configuration:
- FI: 5.3
- PC: IBM Server type (0090-04959 & 0090-04958)
- Ch-A: DPS Carena ( High temp heater)
- Ch-B: Empty
- Ch-C: DPS G5
- Ch-D: ASP (RF type) - some parts broken
Chamber-A: DPS Cerena (High temp heater)
- Turbo pump: EDWARDS (Controller: SCV-1500)
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- PC: IBM Server type (0090-04959 & 0090-04958)
- Ch-A: DPS Carena ( High temp heater)
- Ch-B: Empty
- Ch-C: DPS G5
- Ch-D: ASP (RF type) - some parts broken
Chamber-A: DPS Cerena (High temp heater)
- Turbo pump: EDWARDS (Controller: SCV-1500)
-
Equipment Pictures:
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Added: August 17, 2022
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Views: 50