Nanometrics NanoSpec 9200 Automated Film Analysis System
Asset # :
65951
Equipment Make:
Nanometrics
Equipment Model:
NanoSpec 9200
Type:
Automated Film Analysis System
Wafer Size:
Equipment Configuration:
- The H-axis is not moving with the 9200. The entire Kensington motion controller was sent to a refurbisher to repair the H-axis and verify overall operation.  The unit was sent back and reported to be repaired. The controller was installed, but the H-axis still did not move. The tool was placed in storage. The CCD detector was replaced not long before we stopped using it.
Spare Parts Included:
- Lamp Deuterium 9400-0077 without Timer (4)
- Nanometrics 7200-2418 Halogen Lamp (2)
- Kennsington NanoSpec 9200 WH4 Robot in box
- Dell GX110 PC Motherboard
- Nanospec 9200 Transistor (2)
Spare Parts Included:
- Lamp Deuterium 9400-0077 without Timer (4)
- Nanometrics 7200-2418 Halogen Lamp (2)
- Kennsington NanoSpec 9200 WH4 Robot in box
- Dell GX110 PC Motherboard
- Nanospec 9200 Transistor (2)
Equipment Pictures:
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Added: June 16, 2022
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Views: 607