Applied Materials P 5000 Metal Etcher

Asset # : 65802

Equipment Make: Applied Materials

Equipment Model: P 5000

Type: Metal Etcher

Wafer Size: 8"

Equipment Configuration:

Main Process Modules:
– Chamber #A,#B Metal Etch, #D Strip
– Mark II Main Frame
– 29 Slot Storage Elevator
– Independent Helium Cooling
– Expanded VME
– Phase III Robot
– Phase II Cassette
Sub-Modules:
– AC remote frame
– Digital cables
– Analog cables
– Emergency interlock cables
– Heat exchanger AMAT 0
– RF generators ENI 12A,12B, Astex Microwave