Applied Materials P 5000 Metal Etcher

Asset # : 65802
Equipment Make: Applied Materials
Equipment Model: P 5000
Type: Metal Etcher
Wafer Size: 8"
Equipment Configuration:

Main Process Modules:
– Chamber #A,#B Metal Etch, #D Strip
– Mark II Main Frame
– 29 Slot Storage Elevator
– Independent Helium Cooling
– Expanded VME
– Phase III Robot
– Phase II Cassette
Sub-Modules:
– AC remote frame
– Digital cables
– Analog cables
– Emergency interlock cables
– Heat exchanger AMAT 0
– RF generators ENI 12A,12B, Astex Microwave

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Ad Details

  • Added: June 8, 2022

  • Views: 13

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