Electroglas 4085 X Prober

Asset # : 65709
Equipment Make: Electroglas
Equipment Model: 4085 X
Type: Prober
Wafer Size: 8"
Equipment Configuration:

– XY step resolution: ≤±0.005mm/200mm
– XY verticality: ≤0.006mm/200mm
– XY repeatable resolution≤±0.003mm
– Z repeatable resolution:≤±0.003mm
– XYZ resolution: 0.001mm
– Z stability: ≤0.015mm/150mm
– THETA stage: ±5°
– X range: 220mm
– Y range: 220mm
– Z

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  • Added: June 1, 2022

  • Views: 184

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