Brooks Automation MTX 2000 Wafer Sorter
Asset # :
65181
Equipment Make:
Brooks Automation
Equipment Model:
MTX 2000
Type:
Wafer Sorter
Wafer Size:
12"
Equipment Configuration:
– Load Port 1, FIXLOAD V6: Status Damage
– Load Port 2, FIXLOAD V6: Status Damage
– Load Port 3, SWIVELLOAD: Status NA
– Load Port 4, SWIVELLOAD: Status NA
– Hander 1: Status Normal
– Hander 2: Status Normal
– Hander Controller 1: Status Normal
– Hander C
Equipment Pictures:
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Added: May 9, 2022
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Views: 214