Applied Materials NAR 1200 L Vertical In Line Sputtering Machine

Asset # : 65090
Equipment Make: Applied Materials
Equipment Model: NAR 1200 L
Type: Vertical In-Line Sputtering Machine
Wafer Size:
Equipment Configuration:

– Cycle Time: 40sec
– Glass Size: 730mm x 920mm
Vacuum Data:
– Entrance / exit chamber: < 2 E-02 hPa - Transfer chamber: < 5 E-06 hPa - Process chamber: < 5 E-06 hPa Productivity: - Throughput: 180 Substrates/h (2 subs/carrier) - Target Utilization: > 40
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  • Added: April 28, 2022

  • Views: 187

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