Varian CF 3000 Ion Implanter

Asset # : 64880

Equipment Make: Varian

Equipment Model: CF 3000

Type: Ion Implanter

Wafer Size: 4"

Equipment Configuration:

– Heated end station: 600C
– Double charge capability up to 380KeV
– Gases: BF3 & N2
– AI, B & N2 Implant Species
– 20-190KeV
– 5.0 e14 Max dose
– 1.0 e10 Min dose
– One wafer at a time is processed but 8 can be loaded and pumped down at one time

Equipment Pictures: