Gasonics L 3200 Asher
Asset # :
64441
Equipment Make:
Gasonics
Equipment Model:
L 3200
Type:
Asher
Wafer Size:
4", 6"
Equipment Configuration:
– 2 quartz vacuum chambers
– RF power supply
– Mass flow controlled gas delivery system
– Roughing pumps and pressure control systems (throttle valves)
– Electronics control system
– Automated robotic wafer handler
– The Asher employs two modes of proces
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Added: March 24, 2022
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Views: 392