Cascade / Alessi Summit 12000 B HS Prober

– Integrated safety enclosure (wafer protection & loading access)
– High stability fixed platen “open design”
– High flow multi-zone vacuum system (supports non-flat wafers)
– 4-axis high speed motorized stage
– Nucleus prober control software
– Complete automation tools – auto align, auto die, auto XYZ correction + video window, wafer map, remote access
– Software module for production test + auto “Find 1st Die”, shape tracking, wafer recipes
– User guides, tools, and accessories
– Universal power cord Kit “B” series semi-automatic station platform for
production applications (high speed)
X-Y stage
– Travel 203mm x 203mm (8 in. x 8 in.)
– Resolution ± 1µm (0.04 mils)
– Repeatability 2µm (0.08 mils)
– Accuracy 2.5µm (0.1mils)
– Speed > 50mm/sec (2 in./sec)
– Bearings precision linear cross-roller
– Move time 750 ms
– (200µm Z down – 1000µm XY – 200µm Z up)
Z Stage
– Travel 5mm (0.19 in.)
– Resolution 1µm (0.04 mils)
– Repeatability 1µm (0.04 mils)
– Accuracy 2µm (0.08 mils)
Chuck and service loop
– Independent zones for various wafer sizes, die and shards
– Custom black surface for LED wafer test
Controller
– NI IEEE 488.2 USB GPIB & cable
– High performance PCI-E x16 video card (eVue/digitizer compatible)
– Single and dual-monitor output
– System: Intel Pentium-D 930 (3GHz-dual core, 800MHz FSB)
– Windows XP professional operating system