Tel ACT 12–
Asset # :
63179
Equipment Make:
Tel
Equipment Model:
Act 12
Type:
Wafer Size:
12"
Equipment Configuration:
Hardware Config:
– AC power box
– Chemical cabinet
– Temperature & humidity unit (T&H)
– TCU (2)
– Factory Interface: FOUP (4)
– Handler system: CRA, IRA, PRA (2)
– 2 Block
– Pump: Entegris RDS-01 10cc
– Dev nozzle: LD
– T&H Controller: Shinwa ESA16
Equipment Pictures:
Send BTG Message:
InquireAd Details
-
Added: February 1, 2022
-
Views: 158