Evatec BAP 801 Evaporation Tool
Asset # :
62431
Equipment Make:
Evatec
Equipment Model:
BAP 801
Type:
Evaporation Tool
Wafer Size:
Equipment Configuration:
– Vacuum System: Cryo Pumped
– Power Supply Type: Triode Tube
– High Voltage Min/Max: 6kV/10kV
– Electron Source Type: Four Pocket
– 2 guns
– Gas Inputs: 2
– Film Thickness Monitor
– Residual Gas Analyzer
– With Polycold PFC 672HC, EHV215, 2xEFS, 2xECS,
Equipment Pictures:
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Added: December 7, 2021
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Views: 104