Evatec BAP 801 Evaporation Tool

Asset # : 62431
Equipment Make: Evatec
Equipment Model: BAP 801
Type: Evaporation Tool
Wafer Size:
Equipment Configuration:

– Vacuum System: Cryo Pumped
– Power Supply Type: Triode Tube
– High Voltage Min/Max: 6kV/10kV
– Electron Source Type: Four Pocket
– 2 guns
– Gas Inputs: 2
– Film Thickness Monitor
– Residual Gas Analyzer
– With Polycold PFC 672HC, EHV215, 2xEFS, 2xECS, Cryo Compressor, Plasma Rack, Water Distribution, Khan Software

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Ad Details

  • Added: December 7, 2021

  • Views: 17

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