MRL–3 Tube Furnace

Asset # : 62243
Equipment Make: MRL
Equipment Model:
Type: 3 Tube Furnace
Wafer Size: 8"
Equipment Configuration:

3 Stack Tube configuration:
– Top Tube: Sic High Temperature, TLC bubbler
– Middle Tube: Quartz Tube, Oxidation, TLC Bubbler
– Bottom Tube: Quartz Tube, POCL3 bubbler
Equipment Pictures:
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  • Added: November 23, 2021

  • Views: 136

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