Lam TCP 9400 SE Etcher
Asset # :
62009
Equipment Make:
Lam
Equipment Model:
TCP 9400 SE
Type:
Etcher
Wafer Size:
6"
Equipment Configuration:
– Process: Mesa GaN
– System Controller: 32 Bit Microp
– Version: Envision
– Chamber Body: AL Anodize
– Source Type: Plasma System
– RF Supply (upper): RFG1250 (missing)
– RF Supply (lower): HALO RFG1
– Endpoint: Photodiode
– Pressure Control: VAT 64 (mis
Equipment Pictures:
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Added: November 1, 2021
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Views: 345