Lam TCP 9400 SE Etcher

Asset # : 62009
Equipment Make: Lam
Equipment Model: TCP 9400 SE
Type: Etcher
Wafer Size: 6"
Equipment Configuration:

– Process: Mesa GaN
– System Controller: 32 Bit Microp
– Version: Envision
– Chamber Body: AL Anodize
– Source Type: Plasma System
– RF Supply (upper): RFG1250 (missing)
– RF Supply (lower): HALO RFG1
– Endpoint: Photodiode
– Pressure Control: VAT 64 (missing)
– Temp Control: Chiller
– Turbo Pump: Seiko Seiki (missing)
– Chuck Type: Mechanical

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Ad Details

  • Added: November 1, 2021

  • Views: 39

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