Lam Rainbow 4420 Plasma Cleaner

Asset # : 62008
Equipment Make: Lam
Equipment Model: Rainbow 4420
Type: Plasma Cleaner
Wafer Size: 8"
Equipment Configuration:

– Chamber Body: AL Anodize
– Source Type: Plasma System
– RF Power: OEM-12A
– Endpoint: Photodiode Optical
– Pressure Control: AC2
– Temp Contol: Chiller / Unisem
– Chuck Type: ESC Type 8″
– Match: Manual
Process Gas
– O2 100 sccm: Unit / UFC-1200
– O2 300 sccm: Unit / UFC-1200
Componants
– Chamber Pump: IQDP80/QMB500 / 1ea
– L/L Pump: IQDP80 / 1ea

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Ad Details

  • Added: November 1, 2021

  • Views: 34

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