Lam Rainbow 4420 Plasma Cleaner
Asset # :
62008
Equipment Make:
Lam
Equipment Model:
Rainbow 4420
Type:
Plasma Cleaner
Wafer Size:
8"
Equipment Configuration:
– Chamber Body: AL Anodize
– Source Type: Plasma System
– RF Power: OEM-12A
– Endpoint: Photodiode Optical
– Pressure Control: AC2
– Temp Contol: Chiller / Unisem
– Chuck Type: ESC Type 8″
– Match: Manual
Process Gas
– O2 100 sccm: Unit / UFC-1200
– O2
Equipment Pictures:
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Added: November 1, 2021
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Views: 253