Tempress TS 61004 LH Diffusion Furnace

Asset # : 61184
Equipment Make: Tempress
Equipment Model: TS 61004 LH
Type: Diffusion Furnace
Wafer Size:
Equipment Configuration:

– Panels 1 & 3 need replacing
– Heating element type: MRL AZTEC HELIX
– Oven 1,2,3 have Si tubes installed
– Tube size: inner diameter = 220mm
– Oven 2 includes SiC paddle (ovens 1,3,4 do not)
– Configured for N2, O2, H2
– All gas lines have functioning and calibrated Mikrolys MFCs
– Upgraded Eaton SPX2200
– Original board is operational
– All 4 ovens have connected bubbler systems, integrated with N2 carrier flow
– 2 original ABB boards used for controlling all 4 ovens
– Functioning electro-preumatic control system with digital output
– 16 new isolation adaptors fit between heating element and tube

Equipment Pictures:

Send BTG Message:

Inquire

Ad Details

  • Added: September 8, 2021

  • Views: 32

Description

Tags :