Tempress TS 61004 LH Diffusion Furnace Sold
Asset # :
61184
Equipment Make:
Tempress
Equipment Model:
TS 61004 LH
Type:
Diffusion Furnace
Wafer Size:
8"
Equipment Configuration:
– Panels 1 & 3 need replacing
– Heating element type: MRL AZTEC HELIX
– Oven 1,2,3 have Si tubes installed
– Tube size: inner diameter = 220mm
– Oven 2 includes SiC paddle (ovens 1,3,4 do not)
– Configured for N2, O2, H2
– All gas lines have functioning a
Equipment Pictures:
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Added: September 8, 2021
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Views: 158