Oxford 133 / 3 RIE Source Chamber

Asset # : 60984
Equipment Make: Oxford
Equipment Model: 133 / 3 RIE
Type: Source Chamber
Wafer Size:
Equipment Configuration:

– 208V
– 50/60Hz
– 3 Phase
– 26 Amps

Equipment Pictures:

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  • Added: August 23, 2021

  • Views: 14

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